The workhorse solution for a wide range of RTP/RTA applications with premium features and capabilities.
Jipelec JETFIRST systems are compact and robust halogen lamp heated rapid thermal processing systems specifically designed to meet the requirements of research and small-scale production units with substrate size ranging from pieces of sample to 300-mm diameter. The JETFIRST benchtop design allows a quick and easy installation in the lab facilities. Its user-friendly operating interface is clearly structured and ensures for starting and using of the system in a few hours.
- Single-wafer RTP furnace for process engineering and qualification
- Cold-wall metal chamber design
- High-performance crossed lamp technology
- Atmospheric or vacuum thermal treatment
- Gas introduction capability (any precursor)
- Rapid Thermal Annealing (RTA) and Contact alloying
- Rapid Thermal Oxidation (RTO), deoxidation, and nitridation (RTN)
- Rapid Thermal Diffusion (RTD) – e.g. Spin-on Dopant
- Sulfurization, selenization and crystallization
- Structural and mechanical stress relaxation
- Printed metal contact firing