
Rapid Thermal Processing & Annealing
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Rapid Thermal Processing or Rapid Thermal Annealing (RTP/RTA) is a semiconductor manufacturing process which provides a way to rapidly heat samples to high temperatures to perform short processes on a timescale of a few minutes maximum. Such rapid heating rates are performed by high intensity lamps (e.g. near-infrared light sources – Tungsten-halogen lamps) controlled by pyrometer and thermocouples that measure the sample temperature. Cooling must also be perfectly controlled to prevent dislocations and sample breakage.
Rapid Thermal Processing was originally developed for ion implant anneal but has broadened its application to oxidation, silicide formation, chemical vapor deposition, and advanced applications such as modifying the crystallographic phase of elements, compounds or alloys to enhance properties, lattice interface or stress relaxation. RTP is a flexible technology that provides fast heating and cooling to process temperatures of ~200-1300°C with ramp rates typically 20-200°C/sec, combined with excellent gas ambient control, allowing the creation of sophisticated multistage processes within one processing recipe.
Jipelec JetLight
Entry-level RTP System
Versatile & cost effective, software controlled desktop rapid thermal processing (RTP) tool specifically dseigned to meet requirements
of universities and research laboratories.
Jipelec JetFirst 100/200
Bench Top RTP System 100/200 mm
Versatile & cost-effective software controlled bench top-type rapid thermal processing (RTP) tool designed to meet requirements of R&D laboratories and small scale production units.
Jipelec JetFirst 300
RTP System 300 mm
Versatile & cost-effective software controlled rapid thermal processing (RTP) tool designed to meet requirements for up to 12” wafers in R&D laboratories and small
scale production units.
Jipelec JetStar
Research to Production RTP System
Versatile and robust rapid thermal processing (RTP) equipment designed for fast and error-free process data transferring from development to production.
ECM-JIPELEC-JETFIRST100-200
All Vacuum Furnace Product Lines:
Eco
The new Eco Vacuum Furnace product line makes your heat treating a cleaner, safer, and more efficient operation.
Cristal
Cristal furnaces for high temps insulated with specific metals & molybdenum or tungsten resistors.
Fulgura
Multi-flow quenching furnace ensuring great performance.
Lilliput
Lilliput vacuum furnaces are particularly adapted to laboratory, university and R&D applications.
Turquoise
Heat treatment vacuum furnace specifically tailored to alloys prone to oxidation.
View all ECM USA vacuum furnaces