Rapid Thermal Processing or Rapid Thermal Annealing (RTP/RTA) is a semiconductor manufacturing process which provides a way to rapidly heat samples to high temperatures to perform short processes on a timescale of a few minutes maximum. Such rapid heating rates are performed by high intensity lamps (e.g. near-infrared light sources – Tungsten-halogen lamps) controlled by pyrometer and thermocouples that measure the sample temperature. Cooling must also be perfectly controlled to prevent dislocations and sample breakage.
Rapid Thermal Processing was originally developed for ion implant anneal but has broadened its application to oxidation, silicide formation, chemical vapor deposition, and advanced applications such as modifying the crystallographic phase of elements, compounds or alloys to enhance properties, lattice interface or stress relaxation. RTP is a flexible technology that provides fast heating and cooling to process temperatures of ~200-1300°C with ramp rates typically 20-200°C/sec, combined with excellent gas ambient control, allowing the creation of sophisticated multistage processes within one processing recipe.
JETLIGHT is the Jipelec entry-level software-controlled desktop-type rapid thermal annealing (RTA) system.
JETLIGHT is a compact and robust high speed heat treatment system suitable for the rapid thermal annealing (RTA) of a wide range of material substrates and structures (steel, glass, c-Si solar, III-V, II-VI, Germanium, superconductors and ceramics) with a maximum size of 2-inch dia. (50-mm).
The workhorse solution for a wide range of RTP/RTA applications with premium features and capabilities.
Jipelec JETFIRST systems are compact and robust halogen lamp heated rapid thermal processing systems specifically designed to meet the requirements of research and small-scale production units with substrate size ranging from pieces of sample to 300-mm diameter.
JETSTAR is the Jipelec software-controlled standalone-type rapid thermal annealing (RTA) system dedicated to research-to-production applications.
JETSTAR has been specially developed to meet the requirements of R&D units involved in the development and qualification of industrial processes and managing their implementation in production.